1. Equipment Ownership & Uptime Serve as
primary owner
for assigned tools, such as Trymax and Axcelis tools Maintain and continuously improve
OEE ,
MTBF , and
MTTR
targets. Develop and maintain
equipment health monitoring
and
baseline control
(SPC, FDC, fault codes, alarms). Drive daily
tool performance reviews , documenting issues, actions, and recovery plans. 2. Maintenance & Troubleshooting Plan, execute, and optimize
preventive maintenance (PM)
activities according to OEM recommendations and fab strategies. Perform
complex troubleshooting
on electrical, mechanical, vacuum, RF, gas delivery, and software subsystems. Lead
root cause analysis (RCA)
for chronic and high‑impact issues using structured methods (8D, Fishbone, 5‑Why, etc.). Coordinate and supervise
vendor field service engineers (FSEs)
and contractors during major interventions, upgrades, and rebuilds. 3. Process / Equipment Interaction Work closely with
process e...