Responsibilities
Own and sustain LPI/LPT/ES2 SMIF loadports (and related front‑end wafer handling interfaces) to meet fab uptime, reliability, and quality targets.
Plan, execute, and optimize preventive maintenance (PM), calibration, and spare parts strategy for SMIF/FOUP loadports.
Provide advanced troubleshooting for SMIF issues (mapping errors, ID read fails, door open/close faults, clamp/alignment issues, interlock & safety alarms).
Explore, develop, and implement internal repair capabilities for critical SMIF modules and parts to reduce cost, lead time, and vendor dependency.
Monitor and improve equipment KPIs (availability, MTBF, MTTR, mis‑load/mis‑map rate, alarm rate) using data and logs.
Lead continuous improvement projects on SMIF loadports (reliability upgrades, HW/SW changes, part life extension, cycle‑time and ergonomics improvements).
Coordinate new tool/loadport introductions and modifications: installation, SAT/OQ, integration tests with EFEM/tool &...